Assessment of Durable SiC JFET Technology for +600 ℃ to -125 ℃ Integrated Circuit Operation

摘要

Electrical characteristics and circuit design considerations for prototype 6H-SiC JFET integrated circuits (ICs) operating over the broad temperature range of -125 ℃ to +600 ℃ are described. Strategic implementation of circuits with transistors and resistors in the same 6H-SiC n-channel layer enabled ICs with nearly temperature-independent functionality to be achieved. The frequency performance of the circuits declined at temperatures increasingly below or above room temperature, roughly corresponding to the change in 6H-SiC n-channel resistance arising from incomplete carrier ionization at low temperature and decreased electron mobility at high temperature. In addition to very broad temperature functionality, these simple digital and analog demonstration integrated circuits successfully operated with little change in functional characteristics over the course of thousands of hours at 500 ℃ before experiencing interconnect-related failures. With appropriate further development, these initial results establish a new technology foundation for realizing durable 500 ℃ ICs for combustion engine sensing and control, deep-well drilling, and other harsh-environment applications.