DIAGNOSTICS OF METALOROANIC CHEMICAL VAPOR DEPOSITION OF (Ba,Sr)TiO_3 FILMS BY MICRODIS- CHARGE OPTICAL EMISSION SPECTROSCOPY

摘要

Thermal decomposition and oxidation of source molecules for MOCVD of (Ba,Sr)TiO_3 films as well as the interaction with other source molecules were investigated by using microdischarge optical emission spectroscopy ( μD-OES), which was developed as a new technique for diagnosis of MOCVD processes. The gas phase reactions observed by μD-OES was discussed referring to the incorporation rate of deposited SrTiO_3 films. Fourier transform infrared (FT-IR) spectroscopy was also employed in order to understand the gas phase reactions in more detail.