首页> 外文会议>European Photovoltaic Solar Energy Conference; 20060904-08; Dresden(DE) >EXPERIMENTAL INVESTIGATION OF WIRE SAWING THIN MULTICRYSTALLINE WAFERS
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EXPERIMENTAL INVESTIGATION OF WIRE SAWING THIN MULTICRYSTALLINE WAFERS

机译:线切割薄型多晶晶圆的实验研究

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In this paper we present experimental investigations on wire-sawing thin multicrystalline wafers (down to 140 μm) and a suitable processing processing sequence for high-efficiency solar cells. We assess the material influence on the sawing results as well as the reciprocating cutting scheme. By running the wire back and forth, most geometrical parameters improve while an increased roughness is observed. Additionally, the amount of wire needed in a cut can be considerably reduced. We could experimentally find a relationship for the maximum back reciprocate length in order not to risk wire rupture in the process. For the thin wafer sawing we used a wire guide with stepped thickness so that neighbouring wafers with different thicknesses result. The observed surface quality show an interesting dependence on the wafer thickness. The expected solar cell efficiency increases when the wafer thickness is decreased to reasonable values.
机译:在本文中,我们介绍了线切割薄多晶晶圆(低至140μm)的实验研究,以及适用于高效太阳能电池的合适加工工艺顺序。我们评估材料对锯切结果以及往复式切割方案的影响。通过来回移动导线,可以改善大多数几何参数,同时观察到粗糙度增加。另外,可以大大减少切割所需的导线数量。我们可以通过实验找到最大往复往复运动长度的关系,以免在加工过程中发生线断裂的危险。对于薄晶圆锯,我们使用了具有阶梯式厚度的线材导向器,以便得到具有不同厚度的相邻晶圆。观察到的表面质量显示出对晶片厚度的有趣依赖性。当晶片厚度减小到合理值时,预期的太阳能电池效率增加。

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