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Wire-sawing defects on multicrystalline silicon wafers grown by a directional solidification method

机译:通过定向凝固法生长的多晶硅晶片上的锯线缺陷

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摘要

In the industrial production of multicrystalline silicon (mc-Si) wafers used for solar cells, linear wire-sawing defects are sometimes generated on the surfaces of mc-Si wafers. The presence of such wire-sawing defects makes the mc-Si wafers unsuitable for the fabrication of solar cells. In this work, we first studied the nature of the linear wire-sawing defects on the mc-Si wafers, and then investigated how these wire-sawing defects were generated during the wire-sawing process. It has been found that the linear wire-sawing defects are sawing ridges and ditches on the wafer surfaces, and direct evidence has suggested that they are generated due to the presence of SiC particles embedded within mc-Si. The SiC particles form an obstacle to the movement of the sawing wire during the wire-sawing process, and the sawing wire tends to climb over the SiC obstacle, resulting in the generation of the wire-sawing defects. A model for the generation of the wire-sawing defects has been proposed. This work will be of much practical interest to the commercial mc-Si wafer production communities for solar cells.
机译:在用于太阳能电池的多晶硅(mc-Si)晶片的工业生产中,有时在mc-Si晶片的表面上产生线性锯线缺陷。这种锯线缺陷的存在使得mc-Si晶片不适合于太阳能电池的制造。在这项工作中,我们首先研究了mc-Si晶片上线性锯线缺陷的性质,然后研究了在锯线过程中这些锯线缺陷是如何产生的。已经发现线性线锯切缺陷是晶片表面上的锯脊和沟槽,直接证据表明它们是由于嵌入在mc-Si中的SiC颗粒而产生的。 SiC颗粒在锯线切割过程中对锯线的移动形成障碍,并且锯线倾向于爬过SiC障碍物,从而导致锯线缺陷的产生。已经提出了用于产生锯线缺陷的模型。这项工作对于太阳能电池的商业mc-Si晶片生产社区将具有许多实际意义。

著录项

  • 来源
    《Semiconductor science and technology》 |2008年第5期|65-71|共7页
  • 作者单位

    School of Materials Science and Engineering, Nanchang University, Jiangxi 330031, People's Republic of China Key Laboratory of Optoelectronic Materials and Devices and Department of Physics, Shanghai Normal University, Shanghai 200234, People's Republic of China;

    School of Materials Science and Engineering, Nanchang University, Jiangxi 330031, People's Republic of China;

    LDK Solar Hi-Tech Co., Ltd, Xinyu, Jiangxi 338000, People's Republic of China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
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  • 入库时间 2022-08-18 01:32:13

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