Design of Distributed MEMS Switch Based on Full - 3D Electromagnetic Simulator

摘要

The paper presents a design procedure for a distributed switch consisting of an array of MEMSs (M̱icro-E̱lectro-M̱echanical-S̱ystems)loading a CPW (C̱oP̱lanar Waveguide). The MEMS equivalent circuit is developed from the scattering parameters obtained by using a full-3D electromagnetic simulator and then this equivalent circuit is used to design the switch. The designed switch consisting of 3 MEMSs are finally analyzed using again the electromagnetic simulator. The insertion losses are smaller than 0.1 dB, while the return loss and the isolation are higher than 20dB and 25dB, respectively, up to 25GHz. Also, the MEMS switching time is estimated by solving the MEMS dynamic equation, for step as well as for square wave voltage applied on the MEMS bridge, showing the influence of the voltage amplitude and the frequency on the switching time value.