A surface-micro-machined tunneling-based accelerometer

机译：基于表面微机械隧穿的加速度计

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A surface-micro-machined tunneling-based accelerometer has been designed. A simpler fabrication process has been proposed and illustrated. Performance optimization has been tried by tuning the tunneling tip, beam and proof-mass design.

机译：设计了一种基于表面微机械化隧道的加速度计。已经提出并说明了一种更简单的制造工艺。已经通过调整隧道尖端，梁和质量验证设计来尝试优化性能。

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《Conference on MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, Jan 28-29, 2003, San Jose, California, USA》|2003年|p.243-246|共4页
会议地点 San Jose CA(US)
作者
Runzi Chang; Min She;
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作者单位

University of California at Berkeley Department of Electrical Engineering and Computer Sciences;

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会议组织
原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
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A surface-micro-machined tunneling-based accelerometer

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