A surface-micro-machined tunneling-based accelerometer

机译：一种基于表面微机加工的隧道加速度计

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摘要

A surface-micro-machined tunneling-based accelerometer has been designed. A simpler fabrication process has been proposed and illustrated. Performance optimization has been tried by tuning the tunneling tip, beam and proof-mass design.

机译：设计了一种表面微加工的基于隧道的加速度计。已经提出和说明了更简单的制造过程。通过调整隧道尖端，光束和校样设计来尝试了性能优化。

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《Society of Photo-Optical Instrumentation Engineers Conference on MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication》|2003年||共4页
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Runzi Chang; Min She;
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中图分类 N-532;
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A surface-micro-machined tunneling-based accelerometer

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