High temperature negative resist tunable for new lift off applications

摘要

A new negative resist performance was demonstrated for elevated temperature, thick metal sputter process and lift-off application. This resist, AZ~(~R) EXP nLOF~(~R) 7000, can endure temperatures in excess of 220℃ without pattern profile slope change. The applied resist thickness is ～ 3 μm and is processed to produce sufficient side wall slope adequate for up to 2μm sputter deposited metal thickness and lift-off process.