Towards MEMS Tester for Measuring Metal Nanofilm's Lorenz Number

摘要

The Lorenz number of metals has been considered constant according to the Wiedemann-Franz law. But this has been questioned by the most recent research in nano-scale thermal transfer. To study the size effect of Lorenz number for thin film metals, a MEMS tester was designed and fabricated. The tester is capable of measuring the Lorenz number of thin films or nanowires with various dimensions. The ANSYS simulation showed the measurement error generated by the non-uniformity in the heating area is below 2%.