Stacked nanocrystalline graphene-based Nano-Electro-Mechanical (NEM) contact switch architecture with low pull-in voltage

摘要

Graphene possesses exceptional mechanical and electrical properties, and combining these properties makes graphene a promising candidate for Nano-Electro-Mechanical (NEM) contact switches 1. Graphene based NEM contact switches (GNEM) can offer fast switching response, high on/off ratio and low actuation voltage 2. Nanocrystalline graphene (NCG) that can be grown at wafer-scale with variable thickness using plasma-enhanced chemical vapor deposition (PECVD) 3 has been demonstrated to be a viable material for two-terminal NEMS switches with metal electrodes 4. Due to the metal-free growth, it is a candidate for wafer-scale NCG-NCG NEMS contact switches with advanced device architecture.