MEMS SWITCH CAPABLE OF SIMULTANEOUSLY OBTAINING A HIGH STANDOFF VOLTAGE AND A LOW PULL-IN VOLTAGE WITHOUT CHANGING A DESIGN

摘要

PURPOSE: An MEMS(Micro-Electromechanical System) switch is provided to obtain a high standoff voltage and a low pull-in voltage by optimizing the structure and arrangement of a beam, a driving surface, and an electric contact surface.;CONSTITUTION: A base substrate has a support surface(26). A driving surface(12) has a notch and supplies electrostatic force in driving operation. The extension part of an electric contact surface(16) is formed inside the notch. A beam(22) is attached to the base substrate through the support surface. The free end of the beam is contacted with the part of the extension part. An overlapped part is formed between the electric contact surface and the beam. The overlapped part provides a turn-off ratio of 1.5 to 5.;COPYRIGHT KIPO 2010