Sensitivity analysis of pull-in voltage for RF MEMS switch based on modified couple stress theory

摘要

An approximate analytical model for calculating the pull-in voltage of a stepped cantilever-type radio frequency(RF) micro electro-mechanical system(MEMS)switch is developed based on the Euler-Bernoulli beam and a modified couple stress theory,and is validated by comparison with the finite element results. The sensitivity functions of the pull-in voltage to the designed parameters are derived based on the proposed model.The sensitivity investigation shows that the pull-in voltage sensitivities increase/decrease nonlinearly with the increases in the designed parameters. For the stepped cantilever beam, there exists a nonzero optimal dimensionless length ratio, where the pull-in voltage is insensitive. The optimal value of the dimensionless length ratio only depends on the dimensionless width ratio, and can be obtained by solving a nonlinear equation. The determination of the designed parameters is discussed, and some recommendations are made for the RF MEMS switch optimization.