Resistance and Inductance of Through-Wafer Vias: Measurement, Modeling, and Scaling

摘要

The measurement of substrate vias (SMAs) in process control modules and the interpretation of that measurement is reviewed. They are seen to typically have resistances of about 5 mOhms and noisily variable inductances of 10 - 25 pHenry for a nominal 50 um diameter SVIA. Both increase for smaller SVIA diameters.