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Active-matrix nc-Si electron emitter array for massively parallel direct-write electron-beam system

机译：大规模并行直写电子束系统的有源矩阵nc-Si电子发射器阵列

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This paper presents our designed and prototyped structure of electron emitter array integrated with an active-matrixdriving LSI for high-speed massively parallel direct-write electron-beam (e-beam) system. In addition, the validationresults of its perform

机译：本文介绍了我们的设计和原型结构的电子发射器阵列，该结构与有源矩阵驱动LSI集成在一起，用于高速大规模并行直写电子束（e-beam）系统。另外，其执行的验证结果

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来源
《Alternative lithographic technologies IV.》|2012年|P.12.1-12.9|共9页
会议地点 San Jose CA(US)
作者
N. Ikegami; N. Koshida;
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作者单位

Tokyo Univ. of Agriculture and Technology (Japan);

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会议组织
原文格式 PDF
正文语种 eng
中图分类微电子学、集成电路（IC）;微电子学、集成电路（IC）;
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1. Development of ballistic hot electron emitter and its applications to parallel processing: active-matrix massive direct-write lithography in vacuum and thin-film deposition in solutions [J] . Nobuyoshi Koshida, Akira Kojima, Naokatsu Ikegami, Journal of microanolithography, MEMS, and MOEMS . 2015,第3期

机译：弹道热电子发射器的开发及其在并行处理中的应用：真空中的有源矩阵大规模直接光刻技术以及溶液中的薄膜沉积
2. Development of massively parallel electron beam direct write lithography using active-matrix nanocrystalline-silicon electron emitter arrays [J] . Masayoshi Esashi, Akira Kojima, Naokatsu Ikegami, Microsystems & Nanoengineering . 2015,第2期

机译：利用有源矩阵纳米晶硅电子发射极阵列开发大规模平行电子束直接写入光刻技术
3. Fabrication of Pierce-Type Nanocrystalline Si Electron-Emitter Array for Massively Parallel Electron Beam Lithography [J] . HITOSHI NISHINO, SHINYA YOSHIDA, AKIRA KOJIMA, Electronics and communications in Japan . 2016,第5期

机译：用于大规模平行电子束光刻的皮尔斯式纳米晶硅电子发射器阵列的制作
4. Development of a MEMS electrostatic condenser lens array for nc-Si surface electron emitters of the Massive Parallel Electron Beam Direct-Write system [C] . A. Kojima, N. Ikegami, T. Yoshida, Conference on alternative lithographic technologies VII . 2016

机译：大规模平行电子束直接写入系统的nc-Si表面电子发射器的MEMS静电电容透镜阵列的开发
5. Thermomechanical distortions of electron-beam projection lithographic mask systems during exposure. [D] . Lee, Po-Tung. 2003

机译：电子束投影光刻掩模系统在曝光期间的热机械变形。
6. Fully stretchable active-matrix organic light-emitting electrochemical cell array [O] . Jia Liu, Jiechen Wang, Zhitao Zhang, -1

机译：完全可拉伸的有源矩阵有机发光电化学电池阵列
7. Active-matrix nanocrystalline Si electron emitter array for massively parallel direct-write electron-beam system: first results of the performance evaluation [O] . Naokatsu Ikegami 2012

机译：用于大规模平行直接写电子束系统的主动矩阵纳米晶Si电子发射器阵列：性能评估的第一款结果
8. Investigations on the usefulness of the Massively Parallel Processor for study of electronic properties of atomic and condensed matter systems [R] . Das, T. P. 1988

机译：研究大规模并行处理器在研究原子和凝聚态物质系统电子特性方面的作用

Active-matrix nc-Si electron emitter array for massively parallel direct-write electron-beam system

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