ANALYSIS OF THE SURFACE MORPHOLOGY OF CVD-GROWNDIAMOND FILMS WITH X-RAY DIFFRACTION

摘要

In this study the influence of the addition of nitrogen during growth of diamond films isrndetermined using small-spot X-ray diffraction techniques and compared with the morphologicalrnstructure. Phase identification showed the presence of crystalline molybdenum carbide at therninterface, as well as the incorporation of a small amount of non-diamond carbon throughout therndiamond layer. The pole figures revealed a change in texture with increasing nitrogen in the gasrnphase. The results agree well with results obtained with scanning electron microscopy and laserrnreflectometry.