X-RAY DIFFRACTION DEVICE, DATA ANALYSIS METHOD OF X-RAY DIFFRACTION DEVICE, CONTROL METHOD OF X-RAY DIFFRACTION DEVICE AND PROGRAM FOR IMPLEMENTING THE METHOD

摘要

PROBLEM TO BE SOLVED: To provide an X-ray diffraction device with which pole figure measurement is exactly performed even when a two-dimensional detector is used.SOLUTION: An X-ray diffraction device is equipped with: an X-ray source; a movable holding table which holds samples; a two-dimensional detector which detects X-rays to be emitted by diffraction from samples; and a control processing part which controls the X-ray source and the two-dimensional detector. The control processing part includes: storage means; arithmetic means (process (S50)); and pole figure creation means (process (S70)). The storage part stores a plurality of pieces of intensity data of X-rays detected under a plurality of conditions by the two-dimensional detector. The arithmetic means (process (S50)) performs a compensation operation to the intensity data so as to compensate difference in absorption amounts in samples of X-rays corresponding to the respective pieces of intensity data for the plurality of pieces of intensity data. The pole figure creation means (process (S70)) creates pole figure data on the samples using the plurality of pieces of intensity data after compensation to which the compensation operation is performed.