NON -REFLECTION SAMPLE HOLDER FOR THE X-RAY DIFFRACTION USING AN OFF-AXIS OF A SILICON SINGLE CRYSTAL, A SAMPLE HOLDER MANUFACTURING METHOD, AND AN X-RAY DIFFRACTION ANALYSIS SYSTEM INCLUDING THE SAMPLE HOLDER AND AN X-RAY DIFFRACTION ANALYSIS METHOD, CAPABLE OF REDUCING NOISE BECAUSE DIFFRACTION IS NOT GENERATED REGARDLESS OF AN ILLUMINATION ANGLE

摘要

PURPOSE: A non-reflection sample holder for the X-ray diffraction using an off-axis of a silicon single crystal, a sample holder manufacturing method, and an X-ray diffraction analysis system including the sample holder and an X-ray diffraction analysis method are provided to accurately and rapidly analyze and provide the convenience for performing because data in which noise is diminished with respect to a small quantity sample or a sample having the good transparency.;CONSTITUTION: A method for manufacturing a non-reflection sample holder for the X-ray diffraction using an off-axis of a silicon single crystal is as follows. A single crystal silicon ingot is installed in a cutting member so that a crystalline long-axis and a vertical axis of the cutting member form a specific angel(S10). The cutting member manufactures a plurality of off-axis wafers by cutting the single crystal silicon ingot at a predetermined thickness so that a cutting surface and an off-axis surface form the predetermined angle(S20). The off-axis wafers are manufactured by cutting member so that a plurality of off-axis plates of a rectangular shape is manufactured(S30). A cavity is formed so that the sample can be mounted on the plate(S40).;COPYRIGHT KIPO 2012