PRECISION POSITIONING USING MEMS BASED MICROACTUATOR

摘要

The critical factor for the hard disk manufacturers when designing thernnew generation of high capacity hard disks is 'areal density'. Although linear density hasrnincreased dramatically increases in track density are limited by servo bandwidths, whichrnare controlled by the actuator resonance. An approach, which is currently beingrninvestigated by the researchers, is the use of a second high bandwidth actuator at the endrnof the conventional voice-coil actuator. After theoretical analysis and discussions withrnindustry electrostatic design in which the microactuator will sit on the slider between thernsuspension and the read/write head is selected The design factors are: higher servornbandwidth, higher resonant frequency and low voltage supply. To microfabricate suchrnmicroactuator we propose to use the latest technology called 'Microelectromechanicalrnsystems (MEMS) technology. After schematic drawing layout design is made, it hasrnbeen tested for electrical connections in the electrical layout model and the optimizedrndesign parameters are obtained. Finally it is shown that the design will satisfy thernrequired specifications.