Study and application on thermal EOP (Electro Optical Probing) / EOFM (Electro Optical Frequency Mapping) technique

摘要

EOP (Electro Optical Probing) / EOFM (Electro Optical Frequency Mapping) is a dynamic optical probing technique widely used in IC level defect localization from backside. In this paper, a new method of EOP / EOFM application was discussed to enhance the amplitude and intensity of the EO data and image. One thermal EOP / EOFM experiment was performed to study the characteristic of thermal EO technique. And one real case was analyzed by the thermal EO technique.