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Foil Based Transient Liquid Phase Bonding as a Die-Attachment Method for High Temperature Devices

机译:基于箔的瞬态液相键合作为高温器件的芯片附着方法

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In this study, a foil-based transient liquid phase (TLP) bonding method is proposed as a die-attachment technique for high temperature devices. Silver-indium and silver-tin based binary systems are investigated for high temperature die bonds. An electroplating method was used for producing multi-layered foils as TLP bonding material. In this work, an optimization and characterization of the process was performed. Local microstructure and composition of the TLP bonded joints were studied using SEM and EDX. The bonding layers of Ag-In and Ag-Sn joints proved to be uniform and virtually void-free. The shear strength of the die-attachments exceeds the requirements of usual test standard. The die-attachment stresses induced by the TLP bonding process are analyzed using optical investigation technique such as digital image correlation (DIC).
机译:在这项研究中,提出了一种基于箔的瞬态液相(TLP)键合方法作为高温器件的芯片附着技术。研究了基于银-铟和银-锡的二元体系用于高温芯片键合。电镀方法用于生产多层箔作为TLP粘结材料。在这项工作中,对过程进行了优化和表征。使用SEM和EDX研究了TLP粘结接头的局部微观结构和成分。 Ag-In和Ag-Sn接头的粘结层证明是均匀的,几乎没有空隙。模具附件的剪切强度超过了常规测试标准的要求。使用光学调查技术(例如,数字图像相关性(DIC))分析了由TLP粘合工艺引起的芯片附着应力。

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