Design and fabrication of MEMS six-element array platform with low power consumption for microano gas sensor

摘要

MEMS six-element array platforms (MAP) with low power consumption for microano gas sensors were newly designed, fabricated and characterized. The total size of MAPs was same as 8 mm by 12mm. Five samples of MAPs were designed with ratios of SiNx membrane areas to Pt heater areas 7.14(sample 1), 10.90(sample 2), 13.63(sample 3), 16.51(sample 4), and 19.51(sample 5). Good linearity of temperatures from 300 degree C to 625 degree C with increasing input power consumptions of individual elements of MAPs was shown. Power consumptions of five samples were in the range of about 58∼62 mW at 300 degree C measured at the center of membranes of MAPs. At different applied voltages to micro heaters for all six elements of a MAP sample, they showed good temperature uniformity. It was thought that the suggested MAP could be used for portable microano gas sensor arrays for detection and discrimination mixture gases, simultaneously.