关于低功耗气体传感器阵列的研究

摘要

由电池驱动以微机械技术制造的气体传感器的功耗是十分关键的实际问题.为了研制低功耗气体传感器,在传感器阵列上表面制备完成后,从下表面腐蚀传感器芯片的基底,以造成传感器芯片和封装室之间形成一个空气夹层.从而对有空气夹层的传感器芯片和没有空气夹层的传感器芯片的能耗做比较.实验结果显示,腐蚀过的传感器芯片具有较低的功耗.%The power consumption of battery-driven micro-machined gas sensors is more critical. To research the power consumption of gas sensors, often the front-side of the sensor array has fabricated, the back-side of the sensor is etched to form an air gap between substrate and housing. The power consumption of etched and unetched sensors can be compared. The result shows that the etched sensor has lower power consumption.