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MEMS ACTUATOR WITH LOWER POWER CONSUMPTION AND LOWER COST SIMPLIFIED FABRICATION
MEMS ACTUATOR WITH LOWER POWER CONSUMPTION AND LOWER COST SIMPLIFIED FABRICATION
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机译:具有较低功耗和简化成本的MEMS执行器
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摘要
A microactuator device is disclosed that includes a plurality of generally parallel thin flexible sheets bonded together in a predetermined pattern to form an array of unit cells. Preferably, each of the sheets has only a single electrode layer located on one side of the sheet. Pairs of such sheets are then bonded together at spaced bonding locations with the electrode layers facing one another. Several sets of such sheet pairs can then be bonded together to form a microactuator device.
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