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Comparison of Cu-gate and Ni/Au-gate GaN HEMTs large signal characteristics

机译:铜栅和Ni / Au栅GaN HEMT大信号特性的比较

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摘要

In this paper a complete comparison between Copper (Cu) gate and Nickel-Gold (Ni/Au) gate passivated AlGaN/GaN High Electron Mobility Transistors (HEMTs) is presented. DC and Radio Frequency (RF) performance was compared in order to evaluate the behaviour of the two Schottky contacts in the standard HEMT structure. From the obtained data a critical drain current collapse was observed in the Cu-gate devices, with detrimental effects on the RF performance, while the Ni/An-gate performed nicely both during pulsed I-V and RF measurements. An investigation on the drain current transients and on I_D - V_(GS) characteristics, obtained by pulsed signals showed that an acceptor trap at the Cu/AlGaN interface, with activation energy of about 0.43 eV, could be responsible for the Cu-gate HEMT poorer performance. The results suggest that a detailed investigation on surface treatments, gate metal quality and deposition methods is needed in order to fabricate Cu-gate GaN HEMTs.
机译:在本文中,对铜(Cu)栅极和镍金(Ni / Au)栅极钝化的AlGaN / GaN高电子迁移率晶体管(HEMT)进行了全面比较。比较了直流和射频(RF)性能,以评估标准HEMT结构中两个肖特基接触的行为。从获得的数据来看,在铜栅器件中观察到严重的漏极电流崩溃,这对射频性能产生了不利影响,而镍/安栅极在脉冲I-V和射频测量期间均表现良好。对通过脉冲信号获得的漏极电流瞬变和I_D-V_(GS)特性的研究表明,Cu / AlGaN界面处的受主陷阱具有约0.43 eV的激活能,可能是导致铜栅HEMT的原因性能较差。结果表明,为了制造铜栅GaN HEMT,需要对表面处理,栅金属质量和沉积方法进行详细研究。

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  • 来源
  • 会议地点 Athens(GR);Athens(GR)
  • 作者单位

    Dept. of Information Engineering University of Modena and Reggio Emilia Via Vignolese, 905 -I-41100 Modena - Italy;

    rnDept. of Information Engineering University of Modena and Reggio Emilia Via Vignolese, 905 -I-41100 Modena - Italy;

    rnDept. of Information Engineering University of Modena and Reggio Emilia Via Vignolese, 905 -I-41100 Modena - Italy;

    rnNational Nanotechnology Laboratory of CNR-INFM Tech. Distr. of ISUFI - University of Salento Via per Arnesano, I-73100 Lecce - Italy;

    rnIMM-CNR, University Campus Strada Prov. Lecce-Monteroni km 1,200 I-73100 Lecce-Italy;

    rnNational Nanotechnology Laboratory of CNR-INFM Tech. Distr. of ISUFI - University of Salento Via per Arnesano, I-73100 Lecce - Italy;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 半导体技术 ;
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