ESD Models and Measurement for Semiconductor Device

摘要

Along with the development of technology, semiconductor devices, such as IC and LED, have got wide applications in electronic industry. Semiconductor devices are ESD sensitive. ESD would sometimes cause breakdown and destroy the devices. ESD can also cause indiscoverable soft breakdown that is a hidden trouble and would affect the quality, usage life, reliability of the products and even the profit of company. Many manufacturers have paid dearly for that. Thereby ESD is also comparable to a 'cryptomorphic killer' in electronic industry.rnTill now, manufacturing technology for electronic integrated circuit (IC) devices has been developed into microminiaturization. Semiconductor industries like LED have been developed rapidly. But the problem that products often damaged by ESD also becomes more and more serious. So it is very important to know and increase the antistatic capability of the semiconductor devices. For this purpose, the antistatic capability of the semiconductor devices should be evaluated precisely by scientific means. Then increase the antistatic capability by improving the manufacturing crafts or other methods, so as to increase the quality of products and reduce the loss caused by the ESD.rnThis paper introduces the mechanism, types, discharge models of ESD, experimental methods for ESD recommended by international standards and basic principles of ESD test instruments. It focuses on the ESD test methods and test systems for IC, LED and other semiconductor devices.