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Characterization of a Thick Film Microwave Device (PART I)

机译:厚膜微波设备(PART I)的特性

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摘要

Recent improvements in materials and processing technologies have dramatically increased the frequency range where ceramic thick film circuits can be utilized. Coupled with inherent advantages of thick film technology, i.e. low manufacturing cost, multi-layering capability, and relative insensitivity to substrate surface characteristics, such improvements have resulted in circuits that are penetrating the domain which was previously reserved for thin film technology on polished substrate. In part one of this work proof of concept in the conversion of a thin film microwave amplifier to a five metal layer thick film circuit is attempted. Material and processing strength and limitations are described. The performance characteristics of the substrate are presented and compared to those of the interconnect model. Subsequent work will attempt to extend the operational frequency by incorporating photo lithographic technique to improve the signal layer definition.
机译:材料和加工技术的最新进步极大地增加了可利用陶瓷厚膜电路的频率范围。加上厚膜技术的固有优势,即低制造成本,多层功能以及对基板表面特性的相对不敏感性,这些改进导致电路渗透了以前为抛光基板上的薄膜技术保留的领域。在从薄膜微波放大器到五金属层厚膜电路的转换中,尝试了这种工作原理的一部分。描述了材料和加工强度以及限制。介绍了基板的性能特征,并将其与互连模型的性能特征进行了比较。随后的工作将试图通过结合光刻技术来改善工作频率,以改善信号层的清晰度。

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