Tunable microwave devices using low-sintering-temperature screen-printed barium strontium titanate (BST) thick films

摘要

A tunable microwave phase shifter composed of a low-sintering-temperature, screen-printable barium strontium titanate (BST) film and silver metallization was fabricated on an alumina substrate and co-fired at 900 deg C for 3 h. The dielectric properties of the films were characterized in a frequency range of 0.8-8 GHz using scattering parameter measurements and a quasi-static coplanar waveguide transmission line model. The temperature dependency of the films was measured through capacitance measurements in a frequency range of 0.5-2.5 GHz. The figure of merit (phase shift/dB of insertion loss) of the phase shifter was found to be 14.6 at 3 GHz with an applied bias field strength of 2.5 V/mu m. The performance of the phase shifter is briefly discussed and compared with other phase shifters fabricated by direct screen-printing of BST films.