The influence of Mg-doping on the structure, microstructure, surface morphology, and dielectric properties of Ba{sub}(1-x)SrsTiO{sub}3 (BST) thin films is measured and analyzed. The films were fabricated on MgO substrates with the metalorganic solution deposition technique using carboxylate-alkoxide precursors and annealed at 800 °C in an oxygen atmosphere. The structure, microstructure, surface morphology, and film/substrate compositional quality were evaluated with glancing angle x-ray diffraction, field emission scanning microscopy, atomic force microscopy, and Auger electron spectroscopy studies. Dielectric properties of unpatterned films were measured at 10 GHz using a coupled and tuned split dielectric resonator system, The Mg-doped BST films exhibited improved dielectric and insulating properties compared to undoped Ba{sub}0.6Sr{sub}0.4TiO{sub}3 thin films and are candidates for integration into tunable microwave devices.
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