Microstructure and microwave properties of inkjet printed barium strontium titanate thick-films for tunable microwave devices

摘要

Barium strontium titanate (BST) is a promising material for passive tunable microwave devices such as phase shifters, tunable filters or tunable matching networks. This publication covers the preparation of BST thick-films for microwave applications through inkjet printing. A Ba_(0.6)Sr_(0.4)TiO_3 ink was prepared, printed on alumina substrates and sintered at temperatures between 1100°C and 1200 °C. The microstructure of the thick-films reveals the evolution of grain growth and porosity with increasing sintering temperature. Furthermore, a reaction with the substrate was observed for T ≥ 1175 °C. A maximum tunability of 36% was observed at temperatures right below the onset of the substrate reactions. This process conditions were used for the preparation of a loaded line phase shifter, which successfully shows the capability of the inkjet printing process for future microwave device fabrication.