STUDY OF THE INFLUENCE OF THE SECONDARY ELECTRON EMISSION COEFFICIENT IN RADIO-FREQUENCY ARGON PLASMAS USING PARTICLE IN CELL SIMULATION

摘要

Capacitive radio frequency argon discharges were simulated for a symmetric system, using a plasma computational code, known as Particle In-Cell plus Monte Carlo Collision (PIC - MCC). The simulations showed that the plasma density increases when the secondary electron emission coefficient increases. The electron energy distribution function is also influenced by the secondary electron emission, especially in the region of the high tail energies. In order to obtain reliable simulation results for secondary electron emission coefficients different from zero, it was necessary to introduce an electron-ion recombination reaction in the simulation.