首页> 中文会议>第十四次全国电化学会议 >腐蚀时间对多孔硅形成影响的电化学分析

腐蚀时间对多孔硅形成影响的电化学分析

摘要

the PS layers were fabricated on silicon wafers of n(111)(~25mΩ·cm)using the potentiometry methods,the effect of etching time on the PS formation were systematically studied by obtaining the E}t curves andthe Tafel plots between ±250 mV(vs.Eocp)before and after the experiments. And SEM images were used to characterize the morphology of the samples.

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