MEMS transducer, MEMS microphone and method of providing a MEMS transducer

摘要

A MEMS acoustic transducer (101; 102; 103; 201; 202; 203; 30; 501; 502; 503; 601; 602) comprising: a backplate (12); a diaphragm (18) made of a micro-disrupted type peripheral edge attachment is held in such a way that the membrane (18) can be deflected along a deflection direction (26) towards the back plate (12);a raising element (28) which is arranged between the membrane (18) and the back plate (12) and has a first height along the direction of deflection (26);a support structure (12; 24); anda spacer element (32) which is arranged between the membrane (18) and the support structure (12; 24) and has a second height (h2) along the deflection direction (26) which is greater than the first height; wherein the spacer element (32) is designed to reduce or prevent further deflection of the membrane (18) in the event of mechanical contact with the support element (12; 24) or with the membrane (18);wherein the support structure (12; 24 ) is the backplate itself, or is a support member (24) positioned opposite the backplate (12) such that the membrane (18) is positioned between the backplate (12) and the support member (24);wherein the spacer member ( 32) formed as a circumferential structure or a structure divided into a plurality of segments; and the structure describes a ring or a polygon.