首页> 外国专利> an assembly comprising a word line at least partially surrounding a second metal-containing material and having a first metal-containing material having a different crystallinity than the second metal-containing material

an assembly comprising a word line at least partially surrounding a second metal-containing material and having a first metal-containing material having a different crystallinity than the second metal-containing material

机译:一个组件,包括至少部分地围绕含第二金属材料的字线并具有与第二金属材料不同的结晶度的第一金属材料

摘要

Some embodiments include memory arrays having vertical stacks of alternating isolation levels and word line levels. The channel material extends vertically along the stack. The word line level includes a conductive region having a first metal-containing material and a second metal-containing material. The first metal-containing material at least partially surrounds the second metal-containing material. The first metal-containing material has a different crystallinity than the second metal-containing material. In some embodiments, the first metal-containing material is substantially amorphous and the second metal-containing material has an average particle size in the range of at least about 5 nm to no greater than about 200 nm. The charge storage region is adjacent to the word line level. The charge blocking region is between the charge storage region and the conductive region.
机译:一些实施例包括具有交替隔离级别和字线电平的垂直堆叠的存储器阵列。 通道材料沿堆叠垂直延伸。 字线水平包括导电区域,该导电区域具有第一含金属材料和第二金属材料。 含第一金属材料至少部分地围绕含第二金属材料。 含第一金属材料具有不同的结晶性,而不是第二金属材料。 在一些实施方案中,含第一金属材料基本上是无定形的,并且第二金属材料的平均粒度在至少约5nm至不大于约200nm的范围内。 电荷存储区域与字线电平相邻。 电荷阻挡区域位于电荷存储区域和导电区域之间。

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