首页> 外国专利> UV Surface vacuum deposition method of reflector for air conditioner sterilization with improved UV-ultraviolet reflectance and vacuum deposition device therefor

UV Surface vacuum deposition method of reflector for air conditioner sterilization with improved UV-ultraviolet reflectance and vacuum deposition device therefor

机译:空调灭菌反射器UV表面真空沉积方法,其改进的UV - 紫外线反射和真空沉积装置

摘要

The present invention relates to a method for vacuum deposition of a surface of a reflector for air conditioner sterilization with improved UV-ultraviolet reflectance and a vacuum deposition apparatus therefor. In order to increase the deposition efficiency of the deposition source deposited on the surface of the material by sequentially forming a high vacuum after a low vacuum inside the chamber in which the material is disposed, the material injected with synthetic resin including plastic ( 10) preparing (S1); After removing the contaminants attached to the surface of the material 10, and etching the surface of the material 10 from which the contaminants are removed, a 0.17 to 0.20 μm undercoating layer ( Forming 20) (S2); UV drying after removing static electricity from the surface by spraying air and ions together on the surface of the material 10 on which the undercoating layer 20 is formed (S3); After the material 10 is placed in the chamber 90, a low vacuum is formed in the chamber 90 to reach 2.5×10 -2 torr by using a rotary pump 92 for vacuum deposition. maintaining for 3.5 hours (S4); After removing moisture and residual gas from the inside of the chamber 90 generated in the low-vacuum forming process with a vacuum pump 94, to improve the quality of the aluminum (Al) film through high-purity plasma formation, 6.5×10 -5 torr Forming a high vacuum to reach the step of maintaining 1-1.5 hours (S5); Aluminum (Al), which is the deposition source 80 prepared in the chamber 90, is heated by driving of the heater 96 and evaporated, rubbed against the surface of the undercoating layer 20 of the material 10 and then condensed into a thickness of 0.12 to 0.15 μm. Forming a vacuum deposition thin film layer 30 (S6); Forming a top coating layer 40 of 0.21 to 0.23 μm on the surface of the vacuum deposition thin film layer 30 by spraying a coating solution having a color on the surface of the material 10 on which the vacuum deposition thin film layer 30 is formed (S7); and making the inside of the chamber 90 in a state of 760 to 770 torr by using the rotary pump 92, and then taking out the work-completed material 10 (S8).
机译:本发明涉及一种用于使用改进的UV-紫外反射率和真空沉积装置的空调灭菌的反射器表面的真空沉积方法。为了提高沉积在材料表面上沉积在材料表面上的沉积源的沉积效率,通过在腔室内的低真空之后依次形成高真空,该材料注入包括塑料(10)制备的合成树脂(S1);在去除附着在材料10的表面的污染物之后,并蚀刻除去污染物的材料10的表面,底涂层0.17至0.20μm(S2);通过将空气和离子一起喷射从表面除去底涂层20的材料10的表面上,从表面上除去静电后,uV干燥在底涂层20的表面上(S3);在将材料10放置在腔室90中之后,在腔室90中形成低真空以通过使用旋转泵92达到2.5×10 -2托的用于真空沉积。保持3.5小时(S4);在用真空泵94中从低真空成型过程中产生的腔室90的内部除去水分和残余气体后,通过高纯度等离子体形成,提高铝(Al)膜的质量,6.5×10 -5 Torr形成高真空以达到保持1-1.5小时的步骤(S5);作为在腔室90中制备的沉积源80的铝(Al)通过驱动加热器96并蒸发,蒸发在材料10的底涂层20的表面上,然后冷凝成0.12的厚度。 0.15μm。形成真空沉积薄膜30(S6);通过在形成真空沉积薄膜30的表面上的表面上喷射具有颜色的涂布溶液,在真空沉积薄膜层30的表面上形成0.21至0.23μm的顶涂层40。(S7 );通过使用旋转泵92,使腔室90的内部以760至770托的状态,然后取出工作完成的材料10(S8)。

著录项

  • 公开/公告号KR102327316B1

    专利类型

  • 公开/公告日2021-11-17

    原文格式PDF

  • 申请/专利权人 에이치앤케이(주);

    申请/专利号KR20210136802

  • 发明设计人 이윤관;

    申请日2021-10-14

  • 分类号C23C14/20;B08B1;B08B1/04;B60H3;B60H3/06;C23C14;C23C14/02;C23C14/24;C23C14/50;C23C14/56;

  • 国家 KR

  • 入库时间 2022-08-24 22:30:20

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