STORAGE AND DELIVERY OF ANTIMONY-CONTAINING MATERIALS TO AN ION IMPLANTER

摘要

Novel methods, compositions, and storage and delivery receptors for using antimony containing dopant materials are provided. The composition is selected to have a sufficient vapor pressure to flow at a constant, sufficient and continuous flow rate into the arc chamber as part of the ion implantation process. Antimony containing materials are represented by non-carbon containing formulas, thereby reducing or eliminating the introduction of carbon-based deposits into the ion chamber. The composition is stored in a storage and delivery container under stable conditions comprising a moisture-free environment that does not contain traces of moisture. The storage and delivery receiver is specifically designed to allow delivery of a constant, sufficient and sustained flow rate of high purity vapor phase antimony containing dopant material.