DIELECTRIC TEST SYSTEM AND METHOD FOR MICRO-NANO PATTERNED THIN FILM ARRAY

摘要

The present invention relates to a dielectric test system for a micro-nano patterned thin film array, comprising: a test unit for testing dielectric performance; an insulating sample table, wherein a first sample table electrode and a second sample table electrode are provided on the sample table, and the first sample table electrode and the second sample table electrode are separately and electrically connected to the test unit; a first electrode and a second electrode that are parallel to each other, wherein the first electrode is electrically connected to the first sample table electrode, the second electrode is electrically connected to the second sample table electrode, and the micro-nano patterned thin film array is clamped between the first electrode and the second electrode; and an insulating test fixture located on the sample table, wherein a sample groove for placing the first electrode, the second electrode, and the micro-nano patterned thin film array is formed on the test fixture, the test fixture is detachably connected to an insulating fastening unit, and one end of the fastening unit is located in the sample groove and used for pressurizing the first electrode.