METHOD OF FORMING DIELECTRIC THIN FILM PATTERN AND METHOD OF FORMING LAMINATE PATTERN COMPRISING DIELECTRIC THIN FILM AND CONDUCTIVE THIN FILM

摘要

A method of forming a dielectric thin film pattern, comprises the steps of : depositing a dielectric thin film on a substrate having a resist pattern thereon by a vapor deposition method, wherein as a material for the dielectric thin film, at least one of CeO2, Sm2O3, Dy2O3, Y2O3, TiO2, Al2O3, and MgO is used; and removing the resist pattern whereby the dielectric thin film is patterned.