METHOD OF FORMING DIELECTRIC THIN FILM PATTERN AND METHOD OF FORMING LAMINATE PATTERN COMPRISING DIELECTRIC THIN FILM AND CONDUCTIVE THIN FILM

摘要

A method of forming a dielectric thin film pattern, comprisesthe steps of: depositing a dielectric thin film on a substrate havinga resist pattern thereon by a vapor deposition method, wherein asa material for the dielectric thin film, at least one of CeO2, Sm2O3,Dy2O3, Y2O3, TiO2, Al2O3 and MgO is used; and removing the resistpattern whereby the dielectric thin film is patterned.