首页> 外国专利> QUANTUM CASCADE LASER ELEMENT, QUANTUM CASCADE LASER DEVICE, AND METHOD FOR MANUFACTURING QUANTUM CASCADE LASER DEVICE

QUANTUM CASCADE LASER ELEMENT, QUANTUM CASCADE LASER DEVICE, AND METHOD FOR MANUFACTURING QUANTUM CASCADE LASER DEVICE

机译:量子级联激光元件,量子级联激光装置和制造量子级联激光装置的方法

摘要

This quantum cascade laser element comprises: a semiconductor substrate; a semiconductor laminate having a first end surface and a second end surface; a first electrode; a second electrode; and an antireflection film formed on the first end surface. The semiconductor laminate is configured to oscillate laser light having a central wavelength of at least 7.5 μm. The antireflection film includes: an insulating film which is a CeO2 film formed on the first end surface; a first refractive index film which is a YF3 film or a CeF3 film disposed on the reverse side of the insulating film from the first end surface; and a second refractive index film which is formed on the first refractive index film on the reverse side of the first refractive index film from the first end surface, and has a refractive index of greater than 1.8.
机译:该量子级联激光元件包括:半导体衬底; 具有第一端面和第二端面的半导体层压材料; 第一电极; 第二电极; 并且在第一端表面上形成抗反射膜。 半导体层压材料构造成使具有至少7.5μm的中心波长的激光振荡。 抗反射膜包括:绝缘膜,其是在第一端面上形成的CEO2膜; 第一折射率膜,其是YF3薄膜或设置在绝缘膜的反面的CEF3膜从第一端表面上; 和第二折射率膜,该折射率膜形成在第一折射率膜的第一折射率膜的第一折射率从第一端面的反面,并且具有大于1.8的折射率。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号