Wafer inspection apparatus and diagnostic method of wafer inspection apparatus

摘要

A wafer inspection apparatus according to an embodiment comprises: a tester for applying an electrical signal to a semiconductor device formed on a wafer; a prober electrically connecting the semiconductor device and the tester; a tester control unit for controlling an operation of the tester; It has a prober control unit for controlling the operation of the prober, and when diagnosing the state of the tester, the tester control unit and the prober control unit communicate with each other.