METHODS OF FORMING AN ANTIREFLECTIVE LAYER ON A COMPLEX SUBSTRATE AND COMPLEX SUBSTRATES HAVING THE ANTIREFLECTIVE LAYER

摘要

Described herein are antireflective layers, methods for forming antireflective layers, and structures including antireflective layers. Methods are included for forming a durable antireflective layer on the surface of a substrate, wherein the substrate has a complex three-dimensional shape, wherein the durable antireflective layer comprises a uniform monolayer of silica nanoparticles interconnected by SiO₂, a uniform monolayer of silica nanoparticles bonded to the surface of the substrate, or a combination thereof.