Copper oxide solids used for plating of substrates, a method of manufacturing the copper oxide solids, and a device for supplying a plating solution to a plating bath

摘要

The present invention relates to a copper oxide solid material used for plating a substrate using an insoluble anode. Further, the present invention relates to a method for producing the copper oxide solid. Further, the present invention relates to an apparatus for supplying a plating solution in which a copper oxide solid is dissolved to a plating bath. The copper oxide solid material CS supplied to the plating liquid for plating of the substrate W contains a copper oxide powder and a liquid as a binder for solidifying the copper oxide powder.