Aligning module and substrate processing system having the same

摘要

The present invention relates to substrate processing, and more particularly, to an alignment module for aligning a substrate to be subjected to substrate processing, and a substrate processing system including the same. The present invention discloses an alignment module for aligning the horizontal positions of the two rectangular substrates 1 in a state in which two rectangular substrates 1 are introduced from the outside and then arranged in parallel in a horizontal direction.