Handling system, has handling modules, where substrate handling unit is arranged on one of modules for separate substrate-transfer from carrier that with vertically aligned substrate is transferred between two modules

摘要

The system has a flat substrate for vertical transport of loading and unloading of substrates. Handling modules (M1, M2) are provided, where a substrate handling unit is arranged on one of handling modules for a separate substrate-transfer from a carrier. The carrier with vertically aligned substrate is transferred between a processing unit and modules, respectively and between two modules. An independent claim is also included for a method for operation of a handling system.