A method for the production of an integrated mos - circuit structure with double layers of polycrystalline silicon on a silicon - substrate

• 1. 监测多晶硅衬底热退火活化效果及制造多晶硅衬底的方法 [P] . 中国专利： CN104362109B . 2016.12.21
• 2. 监测多晶硅衬底热退火活化效果及制造多晶硅衬底的方法 [P] . 中国专利： CN104362109A . 2015-02-18
• 3. A method for the production of an integrated mos - circuit structure with double layers of polycrystalline silicon on a silicon - substrate [P] . 德国专利： DE2645014C3 . 1980-02-28

  机译： 一种在硅衬底上生产带有多晶硅双层的集成mos-电路结构的方法。

• 4. A method for the production of an integrated mos - circuit structure with double layers of polycrystalline silicon on a silicon - substrate [P] . 德国专利： DE2645014A1 . 1977-05-12

  机译： 一种在硅衬底上生产带有多晶硅双层的集成mos-电路结构的方法。

• 5. A method for the production of structures of of metal silicide and polysilicon existing double layers on substrates comprising integrated semiconductor circuits by reactive ion etching [P] . 德国专利： DE3216823A1 . 1983-11-10

  机译： 一种通过反应离子刻蚀在包括集成半导体电路的衬底上生产金属硅化物和多晶硅现有双层结构的方法

• 1. Polycrystalline Silicon Solar Cell p-n Junction Capacitance Behavior Modelling under an Integrated External Electrical Field Source in Solar Cell System [J] . Adama Ouedraogo, Boukaré Ouedraogo, Boureima Kaboré, 能源与动力工程（英文） . 2020,第005期
• 2. Effect of Boundary Layers on Polycrystalline Silicon Chemical Vapor Deposition in a Trichlorosilane and Hydrogen System [J] . 张攀, 王伟文, 陈光辉, 中国化学工程学报：英文版 . 2011,第001期
• 3. CMOS-based thermopiles using vertically integrated double polycrystalline silicon layers [C] . Zhou Huchuan, Kropelnicki P., Tsai Julius Minglin, IEEE International Conference on Micro Electro Mechanical Systems . 2013
• 4. Low resistivity contact methodologies for silicon, silicon germanium and silicon carbon source/drain junctions of nanoscale CMOS integrated circuits. [D] . Alptekin, Emre. 2009
• 5. Investigation of AlGaN/GaN high electron mobility transistor structures on 200-mm silicon (111) substrates employing different buffer layer configurations [O] . H.-P. Lee, J. Perozek, L. D. Rosario, -1
• 6. Monolithically Integrated Multilayer Silicon Nitride-on-Silicon Waveguide Platforms for 3-D Photonic Circuits and Devices [O] . Wesley D. Sacher, Jared C. Mikkelsen, Ying Huang, 2018

• 1. Rapid recovery of polycrystalline silicon from kerf loss slurry using double-layer organic solvent sedimentation method [J] . Peng-fei Xing ,Jing Guo ,Yan-xin Zhuang . 矿物冶金与材料学报 . 2013,第010期
• 2. Modulus and Hardness Change of Silicon and Sapphire Substrates by TiC/VC Multilayer Coatings [J] . Andre Belger ,Marianne Reibold ,Peter Paufler . 材料科学与应用期刊（英文） . 2012,第4期
• 3. Probing Structure, Thermochemistry, Electron Affinity and Magnetic Moment of Dysprosium-doped Silicon Clusters DySin (n =3～10) and Their Anions with Double-hybrid Density Functional Theory [J] . NING Hong-Mei ,GU Yan-Song ,CHENG Lin . 结构化学 . 2018,第006期
• 4. 陶瓷硅衬底上沉积多晶硅薄膜研究 [C] . 廖华 ,四川大学物理系 ,林理彬 . 2003年中国太阳能学会学术年会 . 2003
• 5. 多晶硅衬底上制备HIT太阳能电池及其特性研究 [A] . 王弘 . 2015