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Method for forming Pt-Si Schottky barrier contact
Method for forming Pt-Si Schottky barrier contact
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机译:形成Pt-Si肖特基势垒接触的方法
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摘要
Use of a rare gas in combination with oxygen or nitrogen to sputter etch unreacted platinum after formation of a platinum silicide contact structure for the formation of a Schottky Barrier diode in a silicon semiconductor substrate.
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