Differential pressure gauge using semiconductor measuring diaphragm - has outer diaphragms forming chambers with supports connected to inner chamber housing measurement diaphragm

摘要

The differential pressure gauge has diaphragms exposed to the pressures to be measured. Pressures are transmitted by an incompressible liq. to a semiconductor diaphragm with low overload limit. Its deflection-proportional to the pressure difference is converted into an electric signal, and it is protected against excessive overload. Sides of the measurement cell (1) form, during overloads, supports (3, 3') for the diaphragms (4, 4'). Each of the chambers (5, 5')-limited by the diaphragm (4, 4') and the support (3, 3')-is connected with a compensation vol. (7, 7') consisting of a fixed wall (3, 3') and a common, springily-yielding central wall (10) of a compensation chamber (8) in the pressure gauge (1). The semiconductor measurement diaphragm (12) is mounted pref. at the centre of the middle wall (10) to form part of its surface.