Method and apparatus for measuring the thickness of thin layers by x ray fluorescence

摘要

P the invention relates to the measurement of the thicknesses of the thin layers of the sample. / p & & p & it relates to a method and apparatus for measurement of thin layers deposited on one another on a substrate, simultaneously, and by x-ray fluorescence. the incident x-rays excite the fluorescence of the sample, and this is detected by means of a collimator which also allows a direct control of the intensity of the incident x-rays. Application to the measurement simultaneous of the thicknesses of several layers of the electronic circuit. / p