PURPOSE:To obtain a superhigh vacuum pump, by disposing a bulk getter pump element and sputtered ion pump elements in a vacuum tank in the manner that the sputtered ion pump elements surround the bulk getter pump elements, and making molecules of excited gas discharged from the sputtered ion pumps cause reaction with an active substance coated over the surface of the bulk getter pump element. CONSTITUTION:A vacuum tank 7 to be evacuated is connected to a vacuum pump chamber 9 via a gate valve 8. In the vacuum pump chamber 9, a bulk getter pump element 10 is disposed at its central portion, and four sputtered ion pumps 13 are disposed in respective recesses 12 in the manner of surrounding the element 10. The pump element 10 is connected with heating lead wires 11, 11', and N and S magnetic poles for respective sputtered ion pumps 13 are disposed on the outside of the tank 9. With such an arrangement, a sufficient evacuating performance can be obtained since the above two kind of pumps compensate for their drawbacks mutually.
展开▼
