SUPERHIGH VACUUM PUMP USING CRYOGENIC PUMP AND BULK GETTER PUMP IN COMBINATION

摘要

PURPOSE:To improve the evacuating performance of a vacuum pump and to prolong the service life of the same, by disposing a cryo-pump panel at the central portion in a vacuum tank having a gate valve attached thereto, and disposing a bulk getter pump element around the cryo-pump panel by the intermediary of a shield. CONSTITUTION:A vacuum tank 1 is connected via a gate valve 4 to a vacuum tank 9 to be evacuated, and a cryo-pump panel 2 connected to a cryogenic engine 10 is disposed at the central portion in the tank 1. A shield 5 cooled by cooling pipes 8 is disposed around the cryo-pump panel 2, and a bulk getter pump element 3 is disposed at one side of the shield 5 to locate on the outside thereof. Further, a power supply portion 7 is connected to the element 3 and extended to the outside of the vacuum tank 1. The outer wall of the vacuum tank 1 is also cooled by water cooling pipes 8.